JPH0210601B2 - - Google Patents
Info
- Publication number
- JPH0210601B2 JPH0210601B2 JP6812384A JP6812384A JPH0210601B2 JP H0210601 B2 JPH0210601 B2 JP H0210601B2 JP 6812384 A JP6812384 A JP 6812384A JP 6812384 A JP6812384 A JP 6812384A JP H0210601 B2 JPH0210601 B2 JP H0210601B2
- Authority
- JP
- Japan
- Prior art keywords
- transmission line
- line
- insulating film
- slot
- lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 75
- 239000004020 conductor Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000010586 diagram Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000002955 isolation Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
- H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
- H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
- H01P5/184—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers the guides being strip lines or microstrips
- H01P5/185—Edge coupled lines
Landscapes
- Waveguides (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812384A JPS60212001A (ja) | 1984-04-04 | 1984-04-04 | マイクロ波モノリシツク集積回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812384A JPS60212001A (ja) | 1984-04-04 | 1984-04-04 | マイクロ波モノリシツク集積回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60212001A JPS60212001A (ja) | 1985-10-24 |
| JPH0210601B2 true JPH0210601B2 (en]) | 1990-03-08 |
Family
ID=13364651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6812384A Granted JPS60212001A (ja) | 1984-04-04 | 1984-04-04 | マイクロ波モノリシツク集積回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60212001A (en]) |
-
1984
- 1984-04-04 JP JP6812384A patent/JPS60212001A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60212001A (ja) | 1985-10-24 |
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